RTP Tube Furnace

It is designed for annealing semiconductor wafer or solar cell.Selling Point: Can be customized according to your needs.Based on the above information,you can You can choose according to the RTP tube furnace image and the table parameters in detail, and then contact us to get the price you expect.Selling Point: Can be customized according to your needs.Based on the above information,you can choose according to the RTP tube furnace image and the table parameters in detail, and then contact us to get the price you expect.

RTP tube furnace is heated by halogen light around the processing tube with a max. heating rate of max. 300°C/min. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps.

Standard Features

  • Great temperature uniformity.
  • Over temperature protection and alarm.
  • PID automatic control via SCR power control.
  • Halogen heating element for fast heating.
  • Sliding Chamber for fast cooling.

Accessories (specify these at time of order)

    Standard Accessories
  • Quartz tube x1 piece for 1200c furnace
  • Vacuum flanges and Mechanical vacuum gauge x 1 piece
  • Furnace handle hook x 1 piece
  • Quartz Holder
  • Protective gloves x 1 pair
  • O rings x 4 pieces
  • Allen key x 1 piece
  • Optional
  • Digital vacuum gauge
  • Touch Screen
  • Vacuum Pump

Content may be subject to modifications or corrections
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