Tel Number
181-3719-5600
Introduction:
Three temperature controllers of three temperature zone tiltable rotary tubular furnace can independently control the temperature, and can set up 30 temperature rise and fall programs. Temperature zone 1 (the center of heating zone) is heated by silicon molybdenum rod, and the other two temperature zones are heated by silicon carbon rod. This tubular furnace can form a temperature gradient, adjust the temperature of three temperature zones, and prepare functional materials under the thermal gradient, which is also suitable for CVD method Thin film epitaxial growth was made.
Parameters:
Three temperature controllers of three temperature zone tiltable rotary tubular furnace can independently control the temperature, and can set up 30 temperature rise and fall programs. Temperature zone 1 (the center of heating zone) is heated by silicon molybdenum rod, and the other two temperature zones are heated by silicon carbon rod. This tubular furnace can form a temperature gradient, adjust the temperature of three temperature zones, and prepare functional materials under the thermal gradient, which is also suitable for CVD method Thin film epitaxial growth was made.
Parameters:
|
Chamber structure |
Split door |
|
Function |
Tilt and rotate: 0-15rpm Tilt：max15degree |
|
Vacuum pump set |
10pa |
|
Digital Display Vacuum Gauge |
Yin Fukang |
|
Mass flow meter three channel |
Ar 0-8Slm，C2H2 0-2 slm，C2H2 0-2 slm |
|
Temperature Display |
LED or LCD |
|
Max. Temp. |
1100°C |
|
Working Temperature |
Recommend ≤1050°C |
|
Heating Rate |
0~50°C/min (Max. 50°C/min ) |
|
Temp. Control Accuracy |
±1°C |
|
Tube Size |
stainless steel tube :Total tube size 1.2m Inner diameter: 200mm Heating zone:600mm Lifters: four, total length500mm |
|
Max. Power |
20KW |
|
Working Voltage |
AC 460V three phase, 60Hz |
|
Temperature Control |
PID automatic control via SCR power control |
|
Heating curves |
16 steps programmable |
|
Chamber material |
Alumina Fiber |
