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1200℃ Max. Slidable Multi Zone PECVD Furnace
1200℃ Max. Slidable Multi Zone PECVD Furnace

1200℃ Max. Slidable Multi Zone PECVD Furnace

Model:KJ-1200X-II

Description:

KJ-1200X-II is a multi-zone slidable PE-CVD tube furnace system consists of 300W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump.

Products
Detailed
Specific Introduction:
    KJ-1200X-II is a multi-zone slidable PE-CVD tube furnace system consists of 300W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene with the following benefits:

  • Lower temperature processing compared to conventional CVD
  • High heating & cooling rate using a sliding furnace
  • Each heating zone to create a thermal gradient up to 200ºC
  • 1100ºC Max. working temperature
  • Offers a wide range of material deposition, such as Carbon & ZnO nanowire (or tube) and single-layer graphene
Parameters:
Model  KJ-1200X-II-50 KJ-1200X-II-80 KJ-1200X-III-5
Tube Size
(Pls select in options bar)
2" (50mm) OD x 1.7" ID x 71" Length 3.14" (80mm) OD x 2.83" ID x 71'' Length  5" (130mm) OD x 4.8" ID x 79'' Length
Furnace OTF-1200X-II-50 OTF-1200X-II-80 OTF-1200X-III-S-130



Features
  • Two programmable precision temp. controllers with 30 segments.
  • Two separately controlled Heating Zones: 
  • 200mm length for each heating zone
  • 400mm total in heating length
  • 250mm constant temperature heating area if both zones were heated at the same temperature
  • Two programmable precision temp. controllers with 30 segments.
  • Two separately controlled Heating Zones: 
  • 200mm length for each heating zone
  • 400mm total in heating length
  • 250mm constant temperature heating area if both zones were heated at the same temperature
  • Three programmable precision temp. controllers with 30 segments.
  • Three separately controlled Heating Zones: 
  • 200mm length for each heating zone
  • 600mm total in heating length
  • 480mm constant temperature heating area if all zones were heated at the same temperature


Furnace Structures
 
  • Split tube furnace with sliding rail
  • Max 1100ºC for continuous heating
  • Multi-programmable precision digital temperature controllers with 30 segments.
  • Input power: 208 – 240V AC input, a single phase at max. 4KW

Plasma RF Power Supply


 
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:       200W max.
  • Matching:                  Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                       <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz

Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
Vacuum Pump Station and Valves Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy-duty mobile cart
KF25 adapter and stainless steel pipe are connected between the pump and tube flange with a ball valve for customer's plug and play
10E-2 Torr vacuum can be achieved inside the processing tube     
 



Mass Flowmeters & Gas Mixing Station
It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top.  The LCD touch screen is integrated to provide easy control in the gas flow rate of each independent channel.
  • Working Temperature: 5~45 ºC
  • Max. Pressure: 3x106 Pa
  • Accuracy: ±1.5% FS
  • Liner: ±(0.5-1.5)%F.S.
  • Duplicate accuracy: ±0.2%F.S.
  • Controlling Range:
    • Controller 1: 0~100 SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCCM

Heating & Cooling Rates
 
  • RS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one to contact us )
  • In order to achieve Max.heating rate,  the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube
  • In order to achieve the Max. cooling rate, move the heated furnace from hot zone to cold zone
 Overall Dimensions 2000mm L X 800mm W X 1500mm H
Shipping Weight & Dimension Shipping Weight: 1500lbs
Total 4 Pallets:

  1. 48"x40"x60"
  2. 48"x40"x40"
  3. 48"x40"x40"
  4. 81"x52"x40"
Warranty One year limited warranty with lifetime support

 


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Contact Information

E-mail:
web@kejiafurnace.com
Address:
No.18 Hongye Road, Hi-tech zone , Zhengzhou, China, 450000
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Tel Number

181-3719-5600

Email

web@kejiafurnace.com

WhatsApp

+86/18037178440

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Zhengzhou/Kejia