Tel Number
181-3719-5600
Range of Application:
CVD system is widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc. in laboratories, other research institutes and enterprises.
Parameters:
CVD system is widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc. in laboratories, other research institutes and enterprises.
Parameters:
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Product name |
1600℃ Chemical Vapor Deposition CVD System |
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Model |
KJ-T1600-S6044-LK-Z |
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Tube Furnace |
Structure |
Non-split type |
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Insulation layer |
Alumina ceramic fiber |
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Max. Temperature |
1600℃ |
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Working Temperature |
≤1500℃ |
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Heating Rate |
20℃/min (Suggestion 10℃/min) |
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Heating Zone Length |
300mm (Single Zone) |
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Heating Element |
Silicon Molybdenum MoSi2 Heating Rods |
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Temperature Sensor |
B-type thermocouple |
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Temperature Control Accuracy |
±1℃ |
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Tube |
Alumina ceramic tube Φ50, 60, 80mm available |
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Temperature Controller |
PID automatic control with 30 programmable segments for precise control Easy-operation touchscreen control is available. |
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Sealing |
Flanges made of 304SS Gas valve on left flange Vacuum angle valve with KF25 connector on the right flange Note: Standard flange, KF flange and hinge flange are available. |
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Power Supply |
Single phase, 220V, 50Hz. |
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Power |
Power 5kW |
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Vacuum pump unit |
Vacuum pump (With movable box) |
10pa with a mechanical vacuum pump 0.001pa with a mechanical vacuum pump and a diffusion vacuum pump. |
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Pressure Gauge |
Digital Pressure Gauge with high accuracy Measurement Range 1×105--1×10-5Pa |
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Gas-Mixing Unit with mass flow meters |
Four precise mass flow meters (0.02% accuracy) with LED displays are installed on the front panel to control gas flow rate manually. One gas mixing tank is installed on the bottom case. MFC 1: Gas flow range from 0~100 SCCM MFC 2: Control range from 0~200 SCCM MFC 3: Control range from 0~500 SCCM MFC 4: Control range from 0~500 SCCM Gas inlet fitting: four 1/4NPS. Gas outlet fitting: four 1/4NPS. Power: 185-220VAC 50/60Hz 5 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas. |
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Chiller (Optional) |
Be used to cool the tube and vacuum pump. |
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Notes |
Pressure higher than 1.02Mpa will break the tube. Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply. No vacuum condition is allowed when the temperature is higher than 1000℃. Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube. If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage. |
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Warranty |
One year with lifetime technical support. |
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