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Single-Zone Four-Channel CVD System
Single-Zone Four-Channel CVD System

Single-Zone Four-Channel CVD System



KJ-T1200-S6030-LC4 CVD System consists of a tube furnace, a four-channel gas-mixing unit with mass flow meters, and a vacuum pump unit.

Range of Application:
CVD system is widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc.

Product name

Single-Zone Four-Channel CVD System



Tube Furnace

Insulation layer

Alumina ceramic fiber


Max. Temperature



Working Temperature



Outside Shell Temperature



Heating Rate

20℃/min (Suggestion 10℃/min)


Heating Zone Length

300mm (Single Zone)


Heating Element

0Cr27Al7Mo2 resistance wire


Temperature Sensor

K-type thermocouple


Temperature Control Accuracy




Quartz tube

Φ50, 60, 80, 100, 150mm available.


Temperature Controller

Easy-operation touchscreen

PID automatic control with 30 programmable segments for precise control



Flanges made of 304SS and silicon rubber rings

Gas valve on left flange

Vacuum angle valve with KF25 connector on the right flange

Note: Standard flange, KF flange and hinge flange are available.


Power Supply

Single phase, 220V, 50Hz.



Power 3kW

Vacuum pump unit

Vacuum pump

(With movable box)

0.001pa with a mechanical vacuum pump and a diffusion vacuum pump.


Pressure Gauge

Inficon Digital Pressure Gauge with high accuracy

Measurement Range 1×105--1×10-5Pa

Gas-Mixing Unit with mass flow meters

Three precise mass flow meters (0.02% accuracy) are installed to control gas flow rate by spinning knobs.

One gas mixing tank is installed on the bottom case.

MFC 1: Gas flow range from 0~100 SCCM

MFC 2: Control range from 0~200 SCCM  

MFC 3: Control range from 0~500 SCCM

MFC 4: Control range from 0~500 SCCM

Gas inlet fitting: four 1/4NPS.

Gas outlet fitting: four 1/4NPS.

Power: 185-220VAC 50/60Hz

5 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.

Chiller (Optional)

Be used to cool the tube and vacuum pump.


Pressure higher than 1.02Mpa will break the tube.

Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.

No vacuum condition is allowed when the temperature is higher than 1000℃.

Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.

If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.


One year with lifetime technical support.



Contact Information

No.18 Hongye Road, Hi-tech zone , Zhengzhou, China, 450000
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