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1200℃ double-tube slide CVD system
1200℃ double-tube slide CVD system

1200℃ double-tube slide CVD system

Model:KJ-1200T

Description:

This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially applied to the research on flexible metal foil electrodes of the new generation of energy.

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Detailed
Product introduction:
   This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially applied to the research on flexible metal foil electrodes of the new generation of energy. The sliding furnace can realize rapid heating and cooling of materials.
technical parameter:

product name

1200℃ double-tube slide CVD system

The first part: 1200 degree chute double tube double temperature zone tube furnace

Product number

1200 degree chute tube furnace

Furnace tube size

Double quartz tube

Outer tube: OD 100 x ID 96 x 1400 mm

Inner tube: OD 80 x ID 75 x 1800 mm

Heating zone

220+220mm

Power supply

230V, single phase, 50HZ

power

4.0 kw

Heating element

Resistance wire

Heating rate

0-20°C/min

Thermocouple

 Type K

Part 2: Water cooling system

Flange

1. Water chiller CW-3000

2. Water-cooled, sealed double-tube vacuum flange: Allow reaction gas to react between the two tubes (10mm gap), and the cooling gas is directly passed into the inner tube.

Part Three Vacuum System

Vacuum system

1. Anticorrosive digital display vacuum gauge   

2. VRD-16 rotary vane pump, pumping speed 4L/S, including flapper valve KF25 interface, bellows and box

Part Four Air Mixing System

Mass flowmeter

Range:

MFC 1: 0~10 sccm  

MFC 2: 0~200 sccm  

MFC 3: 0~10 slm  

MFC 3: 0~10 slm  

.......

double-tube slide CVD system

 


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Contact Information

E-mail:
web@kejiafurnace.com
Address:
No.18 Hongye Road, Hi-tech zone , Zhengzhou, China, 450000
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Tel Number

181-3719-5600

Email

web@kejiafurnace.com

WhatsApp

+86/18037178440

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Zhengzhou/Kejia