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1400℃ Three-Zone CVD System
1400℃ Three-Zone CVD System

1400℃ Three-Zone CVD System

Model:KJ-T1400-L6030-LC3

Description:

1400℃ Three-Zone CVD System comprises a KJ-T1400 three-zone tube furnace, a three-channel gas-mixing unit with mass flow meters and a set of vacuum pumps.

Products
Detailed
Specific Introduction:
The top temperature of this system is 1400℃, the ultra vacuum degree is 10-3torr. The gas-mixing system will mix the gas precisely and lead it into the tube furnace.
parameters:

Product name

1400℃ Three-Zone CVD System

Model

KJ-T1400-L6030-LC3

Tube Furnace

Max. Temperature

1400℃

 

Working Temperature

≤1300℃

 

Heating Rate

20℃/min (Suggestion 10℃/min)

 

Heating Zone Length

200+200+200mm

 

Heating Element

Silicon Carbide SiC heating rods

 

Temperature Sensor

S-type thermocouple

 

Temperature Control Accuracy

±1℃

 

Tube

Alumina ceramic tube

Φ50, 60, 80mm available

 

Temperature Controller

PID, Intellectual, 30-segment programmable

 

Sealing

Flanges made of 304SS

Gas valve on left flange

Vacuum angle valve with KF25 connector on the right flange

Note: Standard flange, KF flange and hinge flange are available.

 

Power

Single phase, 220V, 50Hz.

Power 3kW

Vacuum pump unit

Vacuum pump

Imported vacuum pump

1.5*10-3Torr

 

Pressure Gauge

Digital Pressure Gauge with high accuracy

Gas-Mixing Unit

Manual Intellectual Control, Led screen.

Each channel can be used for different gas.

Measurement range: 0-500sccm adjustable.

Four manually-controlled stainless steel valves installed on the left side, three inlets, one outlet.

Connection: Ferrule screw.

Chiller (Optional)

Be used to cool the tube and vacuum pump.

Notes

Pressure higher than 1.02Mpa will break the tube.

Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.

No vacuum condition is allowed when the temperature is higher than 1000℃.

Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.

If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.

Warranty

One year with lifetime technical support.


 


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Contact Information

E-mail:
web@kejiafurnace.com
Address:
No.18 Hongye Road, Hi-tech zone , Zhengzhou, China, 450000
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Tel Number

181-3719-5600

Email

web@kejiafurnace.com

WhatsApp

+86/18037178440

FaceBook

Zhengzhou/Kejia