Tel Number
181-3719-5600
Product introduction:
This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially applied to the research on flexible metal foil electrodes of the new generation of energy. The sliding furnace can realize rapid heating and cooling of materials.
technical parameter:
This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially applied to the research on flexible metal foil electrodes of the new generation of energy. The sliding furnace can realize rapid heating and cooling of materials.
technical parameter:
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product name |
1200℃ double-tube slide CVD system |
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The first part: 1200 degree chute double tube double temperature zone tube furnace |
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Product number |
1200 degree chute tube furnace |
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Furnace tube size |
Double quartz tube Outer tube: OD 100 x ID 96 x 1400 mm Inner tube: OD 80 x ID 75 x 1800 mm |
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Heating zone |
220+220mm |
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Power supply |
230V, single phase, 50HZ |
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power |
4.0 kw |
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Heating element |
Resistance wire |
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Heating rate |
0-20°C/min |
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Thermocouple |
Type K |
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Part 2: Water cooling system |
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Flange |
1. Water chiller CW-3000 2. Water-cooled, sealed double-tube vacuum flange: Allow reaction gas to react between the two tubes (10mm gap), and the cooling gas is directly passed into the inner tube. |
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Part Three Vacuum System |
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Vacuum system |
1. Anticorrosive digital display vacuum gauge 2. VRD-16 rotary vane pump, pumping speed 4L/S, including flapper valve KF25 interface, bellows and box |
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Part Four Air Mixing System |
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Mass flowmeter Range: MFC 1: 0~10 sccm MFC 2: 0~200 sccm MFC 3: 0~10 slm MFC 3: 0~10 slm ....... |
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