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Customized fluidized bed CVD system
Customized fluidized bed CVD system

Customized fluidized bed CVD system

Model:KJ-CVD-DZ

Description:

Mainly used in the research of chemical vapor deposition preparation process of ultra-high melting point coatings such as materials and composite carbides.

Products
Detailed

Product introduction:
  The system uses silicon carbide rods as heating elements, adopts a double-layer shell structure and a 30-segment program temperature control instrument, phase-shifting trigger, SCR control, the furnace is made of alumina polycrystalline fiber material, and the two ends of the furnace tube are used The stainless steel flange is sealed. The stainless steel flange is equipped with gas nozzles, valves, pressure gauges, and vacuum pump interfaces. It has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving.
Structural composition:
  customized fluidized bed CVD system, composed of vacuum vertical tube furnace, gas supply system, vacuum system, and vacuum measurement system. 
technical parameter:

product name

Customized fluidized bed CVD system

Product number

KJ-CVD-DZ

Vertical tube furnace

Furnace mode

Vertical open type

Furnace material

Imported alumina refractory fiber

Heating element

High quality silicon carbide rod

Limit temperature

1400°C

Operating temperature

≤1300℃

Heating rate

≤20℃ (recommendation: 15℃/min)

Heating temperature zone

Single temperature zone, multiple temperature zone

Total length of temperature zone

200, 300, 440

Furnace tube material

High purity quartz tube, corundum tube

Tube diameter

40, 50, 60, 80, 100mm...

Sealing method

A set of 304 stainless steel vacuum flange (including sealing silicone ring)  

Control mode

Multi-segment intelligent PID program temperature control, reserved communication interface

Temperature control accuracy

±1℃

Temperature curve

Multi-segment "time-temperature curve" can be set arbitrarily

Temperature measuring element

K-type thermocouple

Pneumatic system

Operating Voltage

220V/50HZ

Maximum output power

18W

Operating temperature

5--45℃

Gas channel

Multiple air sources can be connected at the same time

Flowmeter

Mass flowmeter

Range A  

0~500SCCM

Range B 

0~500SCCM

C-channel range  

0~500SCCM

.....

 .....

Air pressure

-0.1~0.15 MPa

Shut-off valve

Stainless steel material

Gas connection pipe

1/4 stainless steel tube

Digital display vacuum gauge and connecting parts

Digital display vacuum gauge  

Digital display vacuum gauge installed on stainless steel flange

      Vacuum pump set (related connection accessories)

Vacuum pump

Vacuum pump and corresponding connecting pipe 220V/50HZ

Certification

ISO certification, CE certification

After-sales service

One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)

Customized CVD system

 


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Contact Information

E-mail:
web@kejiafurnace.com
Address:
No.18 Hongye Road, Hi-tech zone , Zhengzhou, China, 450000
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Tel Number

181-3719-5600

Email

web@kejiafurnace.com

WhatsApp

+86/18037178440

FaceBook

Zhengzhou/Kejia