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Touch Screen 3 Zones Tube Furnace
Touch Screen 3 Zones Tube Furnace

Touch Screen 3 Zones Tube Furnace

Model:

Description:

KJ-T1200 CVD is a tube furnace with 80mm diameter alumina tube vacuum pump and three channels Mass Flow Meters gas flowing system.

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Detailed
Product Description:
     KJ-T1200 CVD is a tube furnace with 80mm diameter alumina tube vacuum pump and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
Technical Parameter:

Model 

KJ-T1200 CVD with 3 MFC Gas channels

Display

LED

Max. Temperature

1200℃ for short time

Continuous Working Temp.

≤1100℃

Heating Rate

Suggestion: 0~10℃/min

Temperature Zone

220mm+220mm+220mm

Heating Element

Resistance Wire With Mo

Thermocouple

K Type

Temperature Control Accuracy

±1℃

Tube Size

80x1200mm (OD x L)

Tube Block

Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).

Temperature Control

PID automatic control via SCR power control

Program and Ramps

30 steps programmable

Vacuum Flange

Stainless Steel vacuum flange with valves

Power

220V, 50 Hz, single phase at max.6KW

Mass Flow Meters

Three precision mass flow meters :

MFC 1: Gas flow range from 0~100 sccm

MFC 2: Gas flow range from 0~200 sccm

MFC 3: Gas flow range from 0~200 sccm

(Gas flow range can be according to your requirement)

One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually

 

Below photo is 4 MFC for reference. 3 MFC will be with 3 displays

PEVCD


Touch Screen Tube Furnace

 


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Contact Information

E-mail:
web@kejiafurnace.com
Address:
No.18 Hongye Road, Hi-tech zone , Zhengzhou, China, 450000
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Tel Number

181-3719-5600

Email

web@kejiafurnace.com

WhatsApp

+86/18037178440

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Zhengzhou/Kejia