Tel Number
181-3719-5600
Product Description:
KJ-T1200 CVD is a tube furnace with 80mm diameter alumina tube vacuum pump and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
KJ-T1200 CVD is a tube furnace with 80mm diameter alumina tube vacuum pump and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
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Model |
KJ-T1200 CVD with 3 MFC Gas channels | |
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Display |
LED |
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Max. Temperature |
1200℃ for short time |
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Continuous Working Temp. |
≤1100℃ |
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Heating Rate |
Suggestion: 0~10℃/min |
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Temperature Zone |
220mm+220mm+220mm |
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Heating Element |
Resistance Wire With Mo |
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Thermocouple |
K Type |
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Temperature Control Accuracy |
±1℃ |
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Tube Size |
80x1200mm (OD x L) |
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Tube Block |
Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). |
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Temperature Control |
PID automatic control via SCR power control |
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Program and Ramps |
30 steps programmable |
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Vacuum Flange |
Stainless Steel vacuum flange with valves
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Power |
220V, 50 Hz, single phase at max.6KW |
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Mass Flow Meters |
Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~200 sccm MFC 3: Gas flow range from 0~200 sccm (Gas flow range can be according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
Below photo is 4 MFC for reference. 3 MFC will be with 3 displays
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